Dual-Chamber High-Vacuum Resistive Coating Equipment

Equipment Technical Specifications One ：

1. Metal vacuum chamber body: 1 set

1. Appearance: One set of high-quality 304 stainless steel D-shaped vacuum chamber with front and rear doors: the rear door is a hinged square door for convenient cleaning of the vacuum chamber, internal commissioning, maintenance, and loading/unloading of items; the front door is a horizontal pull-type square door. The internal dimensions of the vacuum chamber are D400 × 450 mm, and each door is equipped with one DN100 viewing window.
2. Bottom: Metal Source Interface 3 sets, JTFB-6 00 Air-cooled composite molecular pump interface One set, two sets of CF25 lighting interfaces, and two sets of U.S. MCVAC water-cooled film-thickness probe interfaces;
3. Top: Sample Stage Interface One set, one set of electric damper interfaces, and one set of GDQ-J16B-KF high-vacuum pneumatic damper valve interfaces;
4. Left side: One set of CDQ-J40B-CF ultra-high vacuum pneumatic butterfly valve interface.

2. Metal source system: 1 set

1. Metal Evaporation Source 3 sets: Water-cooled copper electrode Three sets, compatible with evaporation boats (tungsten, molybdenum, and tantalum boats) and helical filaments, equipped with pneumatic shutters, two 1 kW DC power supplies (with digital displays), and current adjustment accuracy. 0. 1A (fine-tuning), with power sufficient for the evaporation of common metals and metal oxides;
2. Partition: The evaporation sources are independent and separated by partitions to prevent cross-contamination.

4. Sample stage system: 1 set

1. Substrate rotation: Rotational speed 0 ~ Continuously adjustable at 30 rpm;
2. Substrate lifting: electrically driven, with adjustable spacing between the substrate and the evaporation source. 20 0-3 0 0 mm, continuously adjustable via the touchscreen;
3. Substrate holder: 130 ×130 mm substrate holder, capable of accommodating 25 × 15 mm substrates; customizable according to customer requirements.
4. Substrate baffle: electric baffle.

5. Vacuum pump unit: 1 set

1. JTFB-600 Air-cooled composite molecular pump 1 unit;
2. One VRD-30 two-stage pump
3. CCQ-150 One CF pneumatic ultra-high vacuum slide valve;
4. One CDQ-J40B-CF ultra-high vacuum pneumatic butterfly valve;
5. One GDQ-J16B-KF high-vacuum pneumatic butterfly valve;
6. One GDQ-J40B-KF high-vacuum pneumatic butterfly valve;
7. One DDC-JQ40-KF vacuum electromagnetic inflation valve;
8. Two sets of KF40 pump-valve connection hoses and one set of KF40 tees;
9. One ZDF-5227 digital vacuum gauge (measurement range: 1×10⁵ to 1×10⁻⁵ Pa).

6. Film Thickness Measurement System: 1 set

1. Film thickness gauge: United States infocon, one set of SQC310 two-channel quartz crystal oscillator film-thickness monitor;
2. Film thickness probe : United States Two sets of MCVAC water-cooled film-thickness probes.

7. Equipment rack: 1 set

1. One set of welded frame made of 40 carbon steel square tubing, with a powder-coated surface;
2. Four 3-inch swivel casters for easy movement and adjustment;
3. Four M16 anchor bolts for locking and positioning.

8. Other electrical control systems: 1 set (electrical control is implemented via an electrical control cabinet integrated within the equipment rack).

1. Electrical Control Cabinet: 1 unit;
2. Baking lighting power supply: 1 unit;
3. Main control power supply (with 10-inch touch screen, PLC controller, sample stage controller, evaporation power supply, pump and valve switches, phase sequence detection, and cable switch connectors, etc.: 1 unit;

9. Other technical parameters:

1. Phase-loss protection, misoperation protection, interlock and mutual locking, as well as one-button vacuum start/stop functions;
2. Power supply: ~ 220V two-phase power supply system (peak power: 5 kW);
3. Water Supply: Small Chiller, Cooling Water Temperature 5°C to 35°C; operating ambient temperature: 10°C to 40°C.
4. Air supply: small oil-free silent air pump, providing 0.2–0.3 MPa air pressure to actuate the pneumatic valve;
5. Ultimate vacuum: better than 6×1 0- The time required to achieve a vacuum from atmospheric pressure down to 6×10⁻⁴ Pa is less than 35 minutes when dry nitrogen is purged; after shutdown for 12 hours, the residual pressure remains ≤10 Pa.

Equipment Technical Specifications Two ：

1. Organic vacuum chamber body: 1 set

5. Appearance: One set of high-quality 304 stainless steel D-shaped vacuum chamber with front and rear doors: the rear door is a hinged square door for convenient cleaning of the vacuum chamber, internal commissioning, maintenance, and loading/unloading of items; the front door is a horizontal pull-type square door. The internal dimensions of the vacuum chamber are D400 × 450 mm, and each door is equipped with one DN100 viewing window.
6. Bottom: Organic Source Interface 6 sets, JTFB-6 00 Air-cooled composite molecular pump interface One set, two sets of CF25 lighting interfaces, and two sets of U.S. MCVAC water-cooled film-thickness probe interfaces;
7. Top: Sample Stage Interface One set, one set of electric damper interfaces, and one set of GDQ-J16B-KF high-vacuum pneumatic damper valve interfaces;
8. Left side: One set of CDQ-J40B-CF ultra-high vacuum pneumatic butterfly valve interface.

2. Organic Source System: 1 set

3. Organic evaporation source 6 sets: 4 CC quartz boat, three temperature-control power supplies (temperature control meter display accuracy: 1°C), temperature range: room temperature to 5°C 00 ℃ (temperature control accuracy ±1℃), equipped with a pneumatic damper;
4. Partition: The evaporation sources are independent and separated by partitions to prevent cross-contamination.

4. Sample stage system: 1 set

5. Substrate rotation: Rotational speed 0 ~ Continuously adjustable at 30 rpm;
6. Substrate lifting: electrically driven, with adjustable spacing between the substrate and the evaporation source. 20 0-3 0 0 mm, continuously adjustable via the touchscreen;
7. Substrate holder: 130 ×130 mm substrate holder, capable of accommodating 25 × 15 mm substrates; customizable according to customer requirements.
8. Substrate baffle: electric baffle.

5. Vacuum pump unit: 1 set

10. JTFB-600 Air-cooled composite molecular pump 1 unit;
11. One VRD-30 two-stage pump
12. CCQ-150 One CF pneumatic ultra-high vacuum slide valve;
13. One CDQ-J40B-CF ultra-high vacuum pneumatic butterfly valve;
14. One GDQ-J16B-KF high-vacuum pneumatic butterfly valve;
15. One GDQ-J40B-KF high-vacuum pneumatic butterfly valve;
16. One DDC-JQ40-KF vacuum electromagnetic inflation valve;
17. Two sets of KF40 pump-valve connection hoses and one set of KF40 tees;
18. One ZDF-5227 digital vacuum gauge (measurement range: 1×10⁵ to 1×10⁻⁵ Pa).

6. Film Thickness Measurement System: 1 set

3. Film thickness gauge: United States infocon, one set of SQC310 two-channel quartz crystal oscillator film-thickness monitor;
4. Film thickness probe : United States Two sets of MCVAC water-cooled film-thickness probes.

7. Equipment rack: 1 set

4. One set of welded frame made of 40 carbon steel square tubing, with a powder-coated surface;
5. Four 3-inch swivel casters for easy movement and adjustment;
6. Four M16 anchor bolts for locking and positioning.

8. Other electrical control systems: 1 set (electrical control is implemented via an electrical control cabinet integrated within the equipment rack).

4. Electrical Control Cabinet: 1 unit;
5. Baking lighting power supply: 1 unit;
6. Main control power supply (with 10-inch touch screen, PLC controller, sample stage controller, evaporation power supply, pump and valve switches, phase sequence detection, and cable switch connectors, etc.: 1 unit;

9. Other technical parameters:

6. Phase-loss protection, misoperation protection, interlock and mutual locking, as well as one-button vacuum start/stop functions;
7. Power supply: ~ 220V two-phase power supply system (peak power: 5 kW);
8. Water Supply: Small Chiller, Cooling Water Temperature 5°C to 35°C; operating ambient temperature: 10°C to 40°C.
9. Air supply: small oil-free silent air pump, providing 0.2–0.3 MPa air pressure to actuate the pneumatic valve;
10. Ultimate vacuum: better than 6×1 0- The time required to achieve a vacuum from atmospheric pressure down to 6×10⁻⁴ Pa is less than 35 minutes when dry nitrogen is purged; after shutdown for 12 hours, the residual pressure remains ≤10 Pa.