Single-chamber high-vacuum resistive coating equipment

Equipment Technical Specifications ：

1. Vacuum chamber body: 1 set

1. Appearance: One set of high-quality 304 stainless steel D-shaped vacuum chamber with front and rear doors: the rear door is a hinged square door for convenient cleaning of the vacuum chamber, internal commissioning, maintenance, and loading/unloading of items; the front door is a horizontal pull-type square door. The internal dimensions of the vacuum chamber are D400 × 480 mm, and each door is equipped with one DN100 viewing window.
2. Bottom: Metal Source Interface 3 sets, 2 organic-source interfaces, JTFB-1200 Air-cooled composite molecular pump interface One set, two sets of CF25 lighting interfaces, and two sets of U.S. MCVAC water-cooled film-thickness probe interfaces;
3. Top: Sample Stage Interface One set, one set of electric damper interfaces, and one set of GDQ-J16B-KF high-vacuum pneumatic damper valve interfaces;
4. Left side: One set of CDQ-J40B-CF ultra-high vacuum pneumatic butterfly valve interface.

2. Metal/Organic Source System: 1 set

1. Metal Evaporation Source 3 sets: Water-cooled copper electrode Three sets, compatible with evaporation boats (tungsten, molybdenum, and tantalum boats) and helical filaments, tool-free disassembly, equipped with pneumatic shutters, three 1 kW SCR voltage-regulating power supplies (with digital displays), and current adjustment accuracy. 1A (fine-tuning), with power sufficient for the evaporation of common metals and metal oxides;
2. Two sets of organic evaporation sources: four 4 cc quartz boats, two temperature-control power supplies (with temperature-control meters displaying an accuracy of ±1°C), temperature range: room temperature to 500°C (temperature-control accuracy ±1°C), equipped with pneumatic shut-off valves.
3. Partition: The evaporation sources are independent and separated by partitions to prevent cross-contamination.

3. Sample stage system: 1 set

1. Substrate rotation: Rotational speed 0 ~ Continuously adjustable at 30 rpm;
2. Substrate lifting: electrically driven, with adjustable spacing between the substrate and the evaporation source. 240 -34 0 mm, continuously adjustable via the touchscreen;
3. Substrate holder: 130 ×130 mm substrate stage, capable of accommodating a single 100 × 100 mm substrate;
4. Substrate water cooling: φ180 water-cooled chuck, connected to a chiller for cooling water;
5. Substrate baffle: electric baffle.

4. Vacuum pump unit: 1 set

1. JTFB-1200 Air-cooled composite molecular pump 1 unit;
2. CCQ-200 One CF pneumatic ultra-high vacuum slide valve;
3. One CDQ-J40B-CF ultra-high vacuum pneumatic butterfly valve;
4. One GDQ-J16B-KF high-vacuum pneumatic butterfly valve;
5. One GDQ-J40B-KF high-vacuum pneumatic butterfly valve;
6. One DDC-JQ40-KF vacuum electromagnetic inflation valve;
7. Two sets of KF40 pump-valve connection hoses and one set of KF40 tees;
8. One ZDF-5227 digital vacuum gauge (measurement range: 1×10⁵ to 1×10⁻⁵ Pa).

5. Film Thickness Measurement System: 1 set

1. Film thickness gauge: United States infocon, one set of SQC310 two-channel quartz crystal oscillator film-thickness monitor;
2. Film thickness probe : United States Two sets of MCVAC water-cooled film-thickness probes.

6. Equipment rack: 1 set

1. One set of welded frame made of 40 carbon steel square tubing, with a powder-coated surface;
2. Four 3-inch swivel casters for easy movement and adjustment;
3. Four M16 anchor bolts for locking and positioning.

7. Other electrical control systems: 1 set (electrical control is integrated within the equipment rack).

1. Baking lighting power supply: 1 unit;
2. Main control power supply (with 10-inch touch screen, PLC controller, sample stage controller, evaporation power supply, pump and valve switches, phase sequence detection, and cable switch connectors, etc.: 1 unit;

9. Other technical parameters:

1. Phase-loss protection, misoperation protection, interlock and mutual locking, as well as one-button vacuum start/stop functions;
2. Power supply: ~ 220V two-phase power supply system (peak power: 5 kW);
3. Water Supply: Small Chiller, Cooling Water Temperature 5°C to 35°C; operating ambient temperature: 10°C to 40°C.
4. Air supply: small oil-free silent air pump, providing 0.2–0.3 MPa air pressure to actuate the pneumatic valve;
5. Ultimate vacuum: better than 6×1 0- The time required to achieve a vacuum from atmospheric pressure down to 6×10⁻⁴ Pa is less than 35 minutes when dry nitrogen is purged; after shutdown for 12 hours, the residual pressure remains ≤10 Pa.