Dual-Chamber High-Vacuum Coating Equipment

I. Electron-beam water-cooled sample stage assembly 1 item

1. Rotation: 57 cm² stepper motor, 1 photoelectric limit switch (for front and rear positions);

2. Lifting and lowering: 57 cm, driven by a 23-step stepper motor with a 1:5 reduction gearbox; equipped with two-point contact limit switches for lifting and lowering; the touchscreen displays the electron-beam height at 400 mm at the high point and 300 mm at the low point, as well as the metal-source height at 340 mm at the high point and 240 mm at the low point; an additional reference point can be set for arbitrary positioning.

3. Sample stage baffle: 24V geared motor, 2 limit switches.

II. Organic Water-Cooled Sample Stage Assembly 1 item

1. Rotation: 57 cm, 23-step stepper motor; 1 photoelectric limit switch (for front and rear positions).

2. Lifting/ lowering: 57 cm, driven by a 23-step stepper motor paired with a 1:5 reduction gearbox; equipped with two-point contact limit switches for lifting and lowering (the touchscreen displays the upper limit at 340 mm and the lower limit at 240 mm), plus an additional adjustable positioning point for free setting.

3. Sample stage baffle: 24V geared motor, 2 limit switches.

III. Electron Beam Evaporation Source Assembly

1. One set of 8 kW electron beam, 380 V

2. Three sets of metal sources and one 1 kW metal source power supply (one unit with three outputs);

3. Pneumatic damper Four sets of 24V directional control valves.

IV. Organic Evaporation Source Assembly

1. Six sets of organic power supplies and three sets of organic power supply units (one-to-two);

2. Pneumatic damper Six sets of 24V directional control valves.

V. Vacuum pump unit

1. Two VRD-30 two-stage pumps ( 220V) ；

2. Two DDC-JQ40-KF vacuum electromagnetic inflation valves ( 220V) ；

3. Two GDQ-J40B-KF high-vacuum pneumatic butterfly valves ( 24V) ；

4. One JTFB-1200 air-cooled composite molecular pump ( 220V) ；

5. One JTFB-600 air-cooled composite molecular pump ( 220V) ；

6. One CCQ-200CF pneumatic ultra-high vacuum slide valve ( 24V) ；

7. One CCQ-150CF pneumatic ultra-high vacuum slide valve ( 24V) ；

8. Two CDQ-J40B-CF ultra-high vacuum pneumatic butterfly valves ( 24V) ；

9. Two GDQ-J16B-KF high-vacuum pneumatic butterfly valves ( 24V) ；

10. One ZDF-5227 digital vacuum gauge (two high-range and two low-range models; measurement range: 1×10⁵ to 1×10⁻⁵ Pa) ( 220V).

VI. Baking Illumination

24 V, 250 W halogen tungsten lamps: two sets per vacuum chamber; baking illumination power supply: one or two units.

VII. Electrical Control System

Rack-mounted design for maximum usable space Three columns, 710 mm high; the upper 170 mm on the left side is unusable, and the upper 120 mm on the right side is unusable.

VIII. 10-inch Touch Screen

IX. Electron Beam Film Thickness System

1. One SQC310 two-channel quartz crystal oscillator film-thickness monitor;

2. Two MCVAC water-cooled film-thickness probes.

X. Film Thickness System

1. One SQM160 dual-channel quartz crystal film-thickness monitor;

2. Two MCVAC water-cooled film-thickness probes

XI. Other

1. One small chiller;

2. One small air compressor.