ZD-300 Single-Chamber High-Vacuum Resistive Coating Equipment

I. Equipment Performance:

Coating equipment With The evaporation source is the main component. It is suitable for laboratory preparation of metallic elements, oxides, dielectric materials, and more, and can also be used for teaching purposes and for preliminary process trials in production lines. The complete equipment set is easy to operate, offers a wide range of integrated functions, and provides ample room for expansion, making it well-suited to and fully capable of meeting the teaching and research needs of colleges and universities.

II. Basic Structure and Main Technical Specifications of the Equipment:

    The coating equipment consists of a vacuum chamber, an evaporation source system, a sample stage system, a vacuum pump unit, a film-thickness monitoring system, and the equipment frame. 架 ， Composed of the electronic control system and the glove box assembly. , the front door of the vacuum chamber can be docked with the glove box, An integrated design approach is adopted, resulting in a compact and neatly arranged equipment configuration. ， Avoid cluttered appearances of experimental equipment.

1. Vacuum chamber body: 1 set

1. Appearance: Cylindrical vacuum chamber One set, top-opening lid, hinged front door ( Equipped with one set of observation windows. )
2. Bottom: Evaporation Source Interface Two sets, one set of film-thickness probe interface, one set of sample-stage interface, and one set of vacuum vent valve interface;
3. Side wall: One set of JTFB-300Z grease-lubricated molecular pump interface, with several flanges pre-installed;
4. Cavity leak rate: the overall leak rate is better than 5 × 10⁻¹⁰ Pa·m³/s, with pressure maintained for 12 hours at a pressure below 10 Pa.

2. Evaporation Source System: 1 set

1. Evaporation source 2 sets: Copper electrode Two sets, compatible with evaporation boats (tungsten, molybdenum, and tantalum boats) and helical filaments, 1 Keyword DC power supply 1 unit, switchable, digital display;
2. Partition : The evaporation source is partitioned by baffles to prevent cross-contamination, and some of the baffles can be removed without tools.

3. Sample stage system: 1 set

1. Substrate holder: square tray, for placement Nine 15×15 mm substrates.

4. Vacuum pump unit: 1 set

1. One VRD-16 two-stage pump;
2. One DDC-JQ25-KF vacuum electromagnetic inflation valve;
3. One set of KF25 pump-valve connection hoses;
4. One GDQ-J25B-KF high-vacuum pneumatic butterfly valve;
5. One JTFB-300Z grease-lubricated molecular pump;
6. Vacuum vent valve 1 unit;
7. One ZDF-5227 digital vacuum gauge (measurement range: 1×10⁵ to 1×10⁻⁵ Pa).

5. Film Thickness Measurement System: 1 set

1. Film thickness gauge: Adopt One SQC310 quartz crystal oscillator film-thickness monitor, operating mode: sequential coating; probe: 2 channels; display and control accuracy: 0.01 Å/s; frequency resolution: 0.01 Hz.
2. Film thickness probe : United States One set of MCVAC water-cooled film-thickness probe, 6 MHz, featuring a quick-release clip-on design for replacing the crystal oscillator, thereby avoiding damage to the crystal caused by threaded compression fittings; it also employs a rubber-ring locking and sealing mechanism.

6. Equipment rack: 1 set

1. One set of welded frame made of 40 carbon steel square tubing, with a powder-coated surface;
2. Four 3-inch swivel casters for easy movement and adjustment;
3. Four M16 anchor bolts for locking and positioning.

7. Other electrical control systems: 1 set (electrical control is integrated within the equipment rack).

1. Main Control Power 1 unit, Match 10-inch touch screen, PLC controller, sample stage and shutter controller, evaporation source shutter controller, pump valve switch , phase sequence detection, and cable switch connectors, etc. 。

8. Other technical parameters:

1. Phase-loss protection, misoperation protection, interlock and mutual locking, as well as one-button vacuum start/stop functions;
2. Power supply: ~ 220V single-phase power supply system (peak power 4 kW);
3. Air supply: small oil-free silent air pump, providing 0.2–0.3 MPa air pressure to actuate the pneumatic valve;
4. Ultimate vacuum: better than 6×10⁻⁵ Pa; the time required to increase the pressure from atmospheric to 6×10⁻⁴ Pa is less than 35 minutes; then fill with dry nitrogen.