Single-chamber high-vacuum resistive coating equipment

I. Equipment Performance:

Coating equipment With The evaporation source is the main component. It is suitable for laboratory preparation of metallic elements, oxides, and other materials, as well as for teaching purposes and preliminary process trials in production lines. The complete equipment set is easy to operate, offers a wide range of integrated functions, and provides ample room for expansion, making it well-suited to and fully capable of meeting the teaching and research needs of colleges and universities.

II. Basic Structure and Main Technical Specifications of the Equipment:

    The coating equipment consists of a vacuum chamber, an evaporation source system, a sample stage system, a vacuum pump unit, a film-thickness monitoring system, and the equipment frame. 架 and Composition of the Electrical Control System ， An integrated design approach is adopted, resulting in a compact and neatly arranged equipment configuration. ， Avoid cluttered appearances of experimental equipment.

1. Vacuum chamber body: 1 set

1. Appearance: High quality One set of 304 stainless steel square vacuum chamber with front and rear doors, internal dimensions: length 1500 mm × width 900 mm × height 800 mm. The doors are hinged square doors for easy cleaning of the vacuum chamber, as well as for commissioning, maintenance, and loading/unloading of items inside the chamber. Each door is equipped with one DN100 viewing window.
2. Bottom: one set of evaporation source interface, One set of MCVAC water-cooled film-thickness probe interface for the United States;
3. Top: one set of sample stage interface, one set of U.S. MCVAC water-cooled film-thickness probe interface, and several预留法兰;
4. Side wall: Two sets of JFTB-1600Z molecular pump interfaces, one set of CCQ-100CF pneumatic ultra-high vacuum slide valves, four sets of CF25 lighting interfaces, one set of GDQ-J16B-KF high-vacuum pneumatic shutter valve interfaces, two sets of evaporation isolation flap interfaces, and several spare flanges.
5. Cavity leak rate: the overall leak rate is better than 5 × 10⁻¹⁰ Pa·m³/s, with pressure maintained for 12 hours at a pressure below 10 Pa.

2. Evaporation Source System: 1 set

1. Water-cooled copper electrode Four sets: power is connected, and the electrode assembly is mounted on an insulating frame for the evaporation source. The frame is equipped with multiple mounting holes for molybdenum electrodes, which are height-adjustable. Several types of evaporation boats—tungsten, molybdenum, tantalum, or helical wire—are also mountable on the electrodes, enabling the deposition of metals and oxides, among other materials.
2. Includes one DC power supply with digital display, allowing current magnitude to be adjusted as needed.
3. Partition: The evaporation source is separated by partitions to prevent cross-contamination, and some partitions can be removed without tools.

3. Sample stage system: 1 set

1. Substrate holder: One set of square water-cooled chuck. Can accommodate one 1200×600 mm substrate.
2. Connected to a low-temperature coolant circulation system with a capacity of 100 L and a temperature range of -40°C to ambient.

4. Vacuum pump unit: 1 set

1. One 2X-70 rotary vane pump;
2. One DN80 solenoid inflation valve;
3. One set of DN100 vacuum pump connecting piping;
4. One CCQ-100CF pneumatic ultra-high vacuum slide valve;
5. Two VRD-48 two-stage pumps;
6. Two DDC-JQ50-KF vacuum electromagnetic inflation valves;
7. Two sets of KF50 pump-valve connection hoses;
8. Two GDQ-J50B-KF high-vacuum pneumatic butterfly valves;
9. Two JFTB-1600Z molecular pumps;
10. Two CCQ-250CF pneumatic ultra-high vacuum slide valves;
11. One GDQ-J16B-KF high-vacuum pneumatic butterfly valve;
12. One ZDF-5227 digital vacuum gauge (measurement range: 1×10⁵ to 1×10⁻⁵ Pa).

5. Film Thickness Measurement System: 1 set

1. Film thickness gauge: Adopt One SQC310 quartz crystal oscillator film-thickness monitor, operating mode: sequential coating; probe: 2 channels; display and control accuracy: 0.01 Å/s; frequency resolution: 0.01 Hz.
2. Film thickness probe : United States Two sets of MCVAC imported water-cooled film-thickness probes, 6 MHz, featuring a quick-release clip-on design for replacing the crystal oscillator, which eliminates the risk of damaging the crystal due to threaded compression fittings and incorporates a rubber-ring locking seal.

6. Equipment rack: 1 set

1. One set of welded frame for 50 carbon steel square tubing, with powder coating on the surface;
2. Four 3-inch swivel casters for easy movement and adjustment;
3. Four M16 anchor bolts for locking and positioning.

7. Other electrical control systems: 1 set (electrical control is integrated within the equipment rack).

1. Baking lighting power supply: 1 unit;
2. Main Control Power 1 unit, Match 10-inch touch screen, PLC controller, sample stage and shutter controller, evaporation source shutter controller, pump valve switch , phase sequence detection, and cable switch connections, etc. 。

8. Other technical parameters:

1. Phase-loss protection, misoperation protection, interlock and mutual locking, as well as one-button vacuum start/stop functions;
2. Power supply: ~380 V three-phase power supply system (peak 30 kW);
3. Water Supply: Small Recirculating Chiller, Cooling Water Temperature 5°C to 35°C; operating ambient temperature: 10°C to 40°C.
4. Air supply: small oil-free silent air pump, providing 0.2–0.3 MPa air pressure to actuate the pneumatic valve;
5. Ultimate vacuum: better than 6×10⁻⁵ Pa; the time to increase from atmospheric pressure to 6×10⁻⁴ Pa is less than 45 minutes; purge with dry nitrogen. 。