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Vertical rectangular target magnetron sputtering equipment (four target)

The equipment is a vertical four target rectangular target magnetron sputtering equipment, which can be used for plating single-layer film

Category:

Magnetron sputtering coating equipment


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Description

The equipment is a vertical four target rectangular target magnetron sputtering equipment, which can be used for plating single-layer film, multi-layer film, alloy film, etc.

Number of rectangular magnetron targets: 4

Target size: 240 × eighty-five

Opening mode: upper cover opening

The substrate can be selected and the speed can be adjusted

The substrate can be heated up to 750 ℃

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