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Address: No. 6-5, Phase IV, Liandong U-Grove, Shenbei New District, Shenyang City, Liaoning Province
Mobile phone:13998121527(Manager Li)
Landline:024-86670968,024-86626713
Email:LiLu@kcvac.cn
Website:www.kcvac.cn
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Three-Source Thermal Evaporation Equipment
Category:
Resistance Heating Evaporation Equipment
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Product Description
Equipment Technical Specifications:
1. Vacuum chamber body: 1 set
1) Appearance: Equipped with high-quality 304 stainless steel D-shaped front and rear doors (the rear door is a hinged square door for convenient cleaning of the vacuum chamber, internal commissioning and maintenance, as well as loading and unloading of items; the front door is a horizontal pull-type square door). Includes one set of vacuum chamber body (with polished surface for a clean and aesthetically pleasing exterior and internal dimensions of D400 × 480 mm), along with three sets of DN100 viewing windows on the front and rear doors.
2) Bottom: three sets of metal-source interfaces, one set of domestically produced 600 L/s air-cooled molecular-pump interfaces, two sets of CF25 illumination interfaces, and one set of imported water-cooled film-thickness probe interfaces;
3) Top: one set of sample stage interface, one set of electric shutter interface, and one set of KF16 pneumatic angle valve interface;
4) Left side: one set of CF35 pneumatic pre-pump angle valve ports, and one set of KF16 pneumatic vent valve ports.
2. Metal/Organic Source System: 1 set
1) Three sets of metal evaporation sources: Three sets of water-cooled copper electrodes, compatible with evaporation boats (tungsten, molybdenum, and tantalum) and helical filaments; tool-free disassembly; equipped with pneumatic shutters; three 1 kW silicon-controlled rectifier voltage-regulating power supplies with digital displays; current adjustment accuracy of 0.1 A (fine-tuning); power output sufficient for the evaporation deposition of common metals, metal oxides, and typical organic materials.
2) Partition: The evaporation sources are independent and separated by partitions to prevent cross-contamination.
3) Other: Because one of the evaporation sources uses Au as the deposition material, its power requirement must be 1/3 to 2/3 higher than that of the other two sources.
3. Sample stage system: 1 set
1) Function: Adjustable height and rotation (rotational speed continuously adjustable from 0 to 30 rpm);
2) Holder: A 120×120 sample holder rack, capable of accommodating substrates smaller than 120×120 mm (e.g., 25 samples measuring 15×15 mm each or 16 samples measuring 25×25 mm each, as per customer requirements);
3) Evaporation distance: The distance between the sample and the evaporation source is 200–300 mm.
4) Baffle: One set of electric baffle for the sample holder.
4. Vacuum pump unit: 1 set
1) One domestically produced 600 L/s air-cooled molecular pump;
2) One 8 L/s direct-drive rotary vane pump;
3) One CF150 high-vacuum pneumatic slide valve;
4) One CF35 high-vacuum pneumatic butterfly valve;
5) Two KF16 high-vacuum pneumatic butterfly valves;
6) One KF40 high-vacuum solenoid shut-off valve;
7) One KF40 vacuum solenoid inflation valve;
8) Two sets of KF40 pump-valve connection hoses and one set of KF40 three-way fittings;
9) One ZDF-5227 digital vacuum gauge (measurement range: 1×10⁵ to 1×10⁻⁵ Pa).
5. Film Thickness Measurement System: 1 set
1) Thickness gauge: The INFICON SQM310 quartz crystal monitor for film-thickness control is employed, configured as follows: sequential coating mode; 2-channel probe input; frequency range of 4 to 6 MHz; rate display resolution of 0.01 Å/s; data storage capacity of 100 processes, 1,000 layers, and 50 layer systems; equipped with power-supply interlock functionality to enable single-channel rate and thickness control; upon reaching the set film thickness, the system automatically cuts off the power supply to halt the deposition process, thereby achieving automated film-thickness control.
2) Film thickness probe: One set of imported water-cooled film-thickness probe.
6. Equipment rack: 1 set
1) One set of welded frame made of 40 carbon steel square tubing, with a powder-coated surface;
2) Four 3-inch swivel casters for easy movement and adjustment;
3) Four M16 anchor bolts for locking and positioning.
7. Other electrical control systems: 1 set (electrical control is implemented using a 1.8-meter embedded electrical control cabinet).
1) Evaporation source baffle power supply: 1 unit;
2) Sample stage and its baffle power supply: 1 unit;
3) Baking lighting power supply: 1 unit;
4) PLC controller (with a 10-inch touch screen): 1 unit;
5) Main control power supply (including the mechanical pump power supply): 1 unit.
8. Other technical parameters:
1) Phase-loss protection, misoperation protection, interlock and mutual locking, as well as one-button vacuum start/stop functions;
2) Power Supply: ~220V two-phase power supply system (peak power 3 kW);
3) Water Supply: Small chiller, cooling water temperature: 5°C to 35°C; ambient operating temperature: 10°C to 40°C.
4) Air supply: a compact, oil-free, silent air pump that delivers an air pressure of 0.2–0.3 MPa to actuate pneumatic valves;
5) Ultimate vacuum: better than 6×10⁻⁵ Pa; from atmospheric pressure to 6×10⁻⁴ Pa in less than 35 minutes (with dry nitrogen purging); after 12 hours of shutdown, the vacuum level is ≤10 Pa.
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