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Address: No. 6-5, Phase IV, Liandong U-Grove, Shenbei New District, Shenyang City, Liaoning Province
Mobile phone:13998121527(Manager Li)
Landline:024-86670968,024-86626713
Email:LiLu@kcvac.cn
Website:www.kcvac.cn
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Dual-chamber thermal evaporation equipment
Category:
Resistance Heating Evaporation Equipment
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Product Description
Equipment Technical Specifications:
1. Metal vacuum chamber body: 1 set
1) Appearance: Equipped with high-quality 304 stainless steel D-shaped front and rear doors (the rear door is a hinged square door for convenient cleaning of the vacuum chamber, internal commissioning and maintenance of the vacuum system, and loading/unloading of items; the front door is a horizontal pull-type square door). Includes one set of vacuum chamber (internal dimensions: D350 × 480 mm), along with two sets of DN100 viewing windows on the rear door.
2) Bottom: two sets of metal-source interfaces, one set of domestically produced 1200 L/s air-cooled molecular pump interface, two sets of CF25 illumination interfaces, and two sets of imported water-cooled film-thickness probe interfaces;
3) Top: one set of sample stage interface, one set of electric shutter interface, and one set of KF16 pneumatic angle valve interface;
4) Left side: one set of CF35 pneumatic pre-pump angle valve ports, and one set of KF16 pneumatic vent valve ports.
2. Organic vacuum chamber body: 1 set
1) Appearance: Equipped with high-quality 304 stainless steel D-shaped front and rear doors (the rear door is a hinged square door for convenient cleaning of the vacuum chamber, internal commissioning and maintenance of the vacuum system, and loading/unloading of items; the front door is a horizontal pull-type square door). Includes one set of vacuum chamber (internal dimensions: D350 × 480 mm), along with two sets of DN100 viewing windows on the rear door.
2) Bottom: two organic-source interfaces, one domestic 1200 L/s air-cooled molecular pump interface, two CF25 illumination interfaces, and two imported water-cooled film-thickness probe interfaces;
3) Top: one set of sample stage interface, one set of electric shutter interface, and one set of KF16 pneumatic angle valve interface;
4) Left side: one set of CF35 pneumatic pre-pump angle valve ports, and one set of KF16 pneumatic vent valve ports.
3. Metal/organic source systems: one set each
1) Two sets of metal evaporation sources (metal chambers): Two sets of water-cooled copper electrodes, compatible with evaporation boats (tungsten, molybdenum, and tantalum boats) and helical filaments; tool-free disassembly; equipped with pneumatic shutters; two 1 kW silicon-controlled rectifier voltage-regulating power supplies with digital displays; current adjustment accuracy of 0.1 A (fine-tuning); power output sufficient for the evaporation deposition of common metals and metal oxides.
2) Two sets of organic evaporation sources (organic chamber): 4 CC quartz boat, two temperature-control power supplies (temperature-control meter display accuracy: 0.1°C), temperature range: room temperature to 500°C (temperature-control accuracy ±1°C), equipped with pneumatic dampers;
3) Partition: The evaporation sources are independent and separated by partitions to prevent cross-contamination.
3. Sample stage system: 2 sets
1) Substrate rotation: continuously adjustable speed from 0 to 30 rpm;
2) Substrate lifting: electrically driven, with a continuously adjustable gap of 200–300 mm between the substrate and the evaporation source via the touch screen;
3) Substrate Holder: 120×120 mm substrate stage, capable of supporting up to 25 ×15 mm substrates (or custom-made according to customer requirements), with a mask plate included;
4) Substrate water cooling: φ180 mm water-cooled stage, connected to a chiller for cooling;
5) Substrate baffle: electric baffle.
4. Vacuum pump unit: 1 set
1) Two domestically produced 1200 L/s air-cooled molecular pumps;
2) Two 8 L/s direct-drive rotary vane pumps;
3) Two CF200 high-vacuum pneumatic slide valves;
4) Two CF35 high-vacuum pneumatic butterfly valves;
5) Four KF16 high-vacuum pneumatic butterfly valves;
6) Two KF40 high-vacuum solenoid shut-off valves;
7) Two KF40 vacuum solenoid inflation valves;
8) Four sets of KF40 pump-valve connection hoses and two sets of KF40 tees;
9) Two ZDF-5227 digital vacuum gauges (measurement range: 1×10⁵ to 1×10⁻⁵ Pa).
5. Film Thickness Measurement System: 1 set
1) Thickness gauge: One unit of the U.S.-made Infocon SQM160 four-channel quartz crystal film-thickness monitor is adopted.
2) Film thickness probe: Four sets of imported water-cooled film-thickness probes from the United States.
6. Equipment rack: 1 set
1) One set of welded frame made of 40 carbon steel square tubing, with a powder-coated surface;
2) Four 3-inch swivel casters for easy movement and adjustment;
3) Four M16 anchor bolts for locking and positioning.
7. Other electrical control systems: 1 set (electrical control is implemented using a 1.8-meter embedded electrical control cabinet).
1) Metal source power supplies: 2 units (1 in use, 1 as backup);
2) Organic-source power supplies: 2 units (1 redundant);
3) Evaporation source baffle power supply: 1 unit;
4) Sample stage and its baffle power supply: 1 unit;
5) Baking lighting power supplies: 2 units;
6) PLC controller (with a 10-inch touch screen): 1 unit;
7) Main control power supply (including the mechanical pump power supply): 1 unit.
8. Other technical parameters:
1) Phase-loss protection, misoperation protection, interlock and mutual locking, as well as one-button vacuum start/stop functions;
2) Power Supply: ~220V two-phase power system (peak power 5 kW);
3) Water Supply: Small chiller, cooling water temperature: 5°C to 35°C; operating ambient temperature: 10°C to 40°C.
4) Air supply: a compact, oil-free, silent air pump that delivers 0.2–0.3 MPa of air pressure to actuate pneumatic valves;
5) Ultimate vacuum: better than 6×10⁻⁵ Pa; from atmospheric pressure to 6×10⁻⁴ Pa in less than 35 minutes (with dry nitrogen purging); after 12 hours of shutdown, the vacuum level is ≤10 Pa.
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