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Address: No. 6-5, Phase IV, Liandong U-Grove, Shenbei New District, Shenyang City, Liaoning Province
Mobile phone:13998121527(Manager Li)
Landline:024-86670968,024-86626713
Email:LiLu@kcvac.cn
Website:www.kcvac.cn
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14 Source Resistance-Type Thermal Evaporation Equipment
Category:
Resistance Heating Evaporation Equipment
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Product Description
Equipment Technical Specifications:
1. Vacuum chamber body: 1 set
1. Vacuum chamber body: 1 set
1) Appearance: 304 stainless steel D-shaped front and rear doors (the rear door is a hinged square door for easy cleaning of the vacuum chamber, internal commissioning and maintenance, and loading/unloading of items; the front door is a horizontal pull-type square door); one set of vacuum chamber body (electrolytically polished for a clean and aesthetically pleasing interior and exterior, with internal dimensions of D400 × 480 mm); three sets of DN100 viewing windows are provided on the front and rear doors.
2) Bottom: 4 sets of metal-source interfaces, 10 sets of organic-source interfaces, 1 set of domestically produced 1200 L/s air-cooled molecular-pump interface, 2 sets of CF25 illumination interfaces, and 4 sets of imported water-cooled film-thickness probe interfaces;
3) Top: one set of sample stage interface, one set of electric shutter interface, and one set of KF16 pneumatic angle valve interface;
4) Left side: one set of CF35 pneumatic pre-pump angle valve ports, and one set of KF16 pneumatic vent valve ports.
2. Metal/Organic Source System: 1 set
1) Four sets of metal evaporation sources: Four sets of water-cooled copper electrodes, compatible with evaporation boats (tungsten, molybdenum, and tantalum boats) and helical filaments; tool-free disassembly; equipped with pneumatic shutters; two 1 kW silicon-controlled rectifier voltage-regulating power supplies with digital displays; current adjustment accuracy of 0.1 A (fine-tuning); power output sufficient for the evaporation deposition of common metals and metal oxides.
2) 10 sets of organic evaporation sources: Four 4-inch quartz boats are placed in the source chamber, equipped with four temperature-control power supplies (PLD-controlled, using Japan’s Diancong SR93 temperature controller, which enables temperature- or current-based compensation to stabilize the evaporation rate and also supports manual current control), with an accuracy of ±1°C and a temperature range of room temperature to 500°C, along with pneumatic shut-off dampers.
3) Partition: The evaporation source is partitioned to prevent cross-contamination.
3. Sample stage system: 1 set
1) Function: Adjustable height and rotation (rotational speed continuously adjustable from 0 to 30 rpm);
2) Holder: A 120×120 sample holder rack, capable of accommodating substrates smaller than 120×120 mm (e.g., 25 samples measuring 15×15 mm each or 16 samples measuring 25×25 mm each, as per customer requirements);
3) Evaporation distance: The distance between the sample and the evaporation source is 200–300 mm.
4) Baffle: One set of electric baffle for the sample holder.
4. Vacuum pump unit: 1 set
1) One domestically produced 1200 L/s air-cooled molecular pump;
2) One domestically produced 8 L/s direct-drive rotary vane pump;
3) One CF200 high-vacuum pneumatic slide valve;
4) One CF35 high-vacuum pneumatic butterfly valve;
5) Two KF16 high-vacuum pneumatic butterfly valves;
6) One KF40 high-vacuum solenoid shut-off valve;
7) One KF40 vacuum solenoid inflation valve;
8) Two sets of KF40 pump-valve connection hoses and one set of KF40 three-way fittings;
9) One ZDF-5227 digital vacuum gauge.
5. Rack: 1 set
1) One set of welded frame made of 40 carbon steel square tubing, with a powder-coated surface;
2) Four 3-inch swivel casters for easy movement and adjustment;
3) Four M16 anchor bolts for locking and positioning.
6. Electrical Control System: 1 set (with electrical control integrated into the rack)
1) Organic-source power supplies: 4 units (1 unit with 2 outputs, 1 unit with 3 outputs);
2) Metal source power supplies: 2 units (1 with 2);
3) Evaporation source baffle power supply: 1 unit;
4) Sample stage and its baffle power supply: 1 unit;
5) Baking lighting power supply: 1 unit;
6) PLC controller (10-inch color touch screen): 1 unit;
7) Main control power supply (including the mechanical pump power supply): 1 unit.
7. Other technical parameters:
1) Phase-loss protection, misoperation protection, and other functions;
2) Power Supply: ~220V two-phase power system (peak power 6 kW);
3) Water Supply: Small chiller, cooling water temperature: 5°C to 35°C; operating ambient temperature: 10°C to 40°C.
4) Air Supply: A small air compressor provides an air pressure of 0.2–0.3 MPa to power pneumatic valves;
5) Ultimate vacuum: 6×10⁻⁵ Pa; time to reach 6×10⁻⁴ Pa from atmospheric pressure is less than 35 minutes (with dry nitrogen purging); after shutdown for 12 hours, the vacuum level is ≤10 Pa.
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