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Address: No. 6-5, Phase IV, Liandong U-Grove, Shenbei New District, Shenyang City, Liaoning Province
Mobile phone:13998121527(Manager Li)
Landline:024-86670968,024-86626713
Email:LiLu@kcvac.cn
Website:www.kcvac.cn
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Product Description
Equipment Technical Specifications:
1. Metal vacuum chamber body: 1 set
1) Appearance: Equipped with high-quality 304 stainless steel D-shaped front and rear doors (the rear door is a hinged square door for convenient cleaning of the vacuum chamber, internal commissioning and maintenance of the vacuum system, and loading/unloading of items; the front door is a horizontal pull-type square door). Includes one set of vacuum chamber body (internal dimensions: D400 × 480 mm) and two sets of DN100 viewing windows for the front and rear doors.
2) Bottom: four metal-source interfaces, one domestically produced 600 L/s air-cooled molecular pump interface (with a baffle inside the vacuum chamber to prevent dust ingress), two CF25 illumination interfaces, and two imported water-cooled film-thickness probe interfaces;
3) Top: one set of sample stage interface, one set of electric shutter interface, and one set of KF16 pneumatic angle valve interface;
4) Left side: one set of CF35 pneumatic pre-pump angle valve ports, and one set of KF16 pneumatic vent valve ports.
2. Metal evaporation source system: 1 set
1) Four metal evaporation sources (metal chambers): Four sets of water-cooled copper electrodes, compatible with evaporation boats (tungsten, molybdenum, and tantalum boats) and helical filaments; tool-free disassembly; equipped with pneumatic shutters; four 1 kW silicon-controlled rectifier voltage-regulating power supplies (one per set), with digital displays; current adjustment accuracy of 1 A; power output sufficient for the evaporation deposition of common metals and metal oxides.
2) Partition: The evaporation sources are independent and separated by partitions to prevent cross-contamination.
3. Sample stage system: 1 set
1) Substrate rotation: continuously adjustable speed from 0 to 30 rpm;
2) Substrate lifting: electrically driven, with a continuously adjustable gap of 200–300 mm between the substrate and the evaporation source via the touch screen;
3) Substrate Holder: 120×120 mm substrate stage, capable of supporting up to 25 ×15 mm substrates (or custom-made according to customer requirements), with a mask plate included;
4) Substrate water cooling: φ180 mm water-cooled stage, connected to a chiller for cooling;
5) Substrate baffle: electric baffle.
4. Vacuum pump unit: 1 set
1) One domestically produced 600 L/s air-cooled molecular pump;
2) One 8 L/s direct-drive rotary vane pump;
3) One CF150 high-vacuum pneumatic slide valve;
4) One CF35 high-vacuum pneumatic butterfly valve;
5) Two KF16 high-vacuum pneumatic butterfly valves;
6) One KF40 high-vacuum pneumatic butterfly valve;
7) One KF40 vacuum solenoid inflation valve;
8) Two sets of KF40 pump-valve connection hoses and one set of KF40 three-way fittings;
9) One ZDF-5227 digital vacuum gauge (measurement range: 1×10⁵ to 1×10⁻⁵ Pa).
5. Film Thickness Measurement System: 1 set
1) Thickness gauge: One unit of the U.S.-made Infocon SQM310 two-channel quartz crystal film-thickness monitor.
2) Film thickness probe: Two sets of imported water-cooled film-thickness probes from the United States.
6. Equipment rack: 1 set
1) One set of welded frame made of 40 carbon steel square tubing, with a powder-coated surface;
2) Four 3-inch swivel casters for easy movement and adjustment;
3) Four M16 anchor bolts for locking and positioning.
7. Other electrical control systems: 1 set (electrical control shall be implemented using a 1.8-meter electrical control cabinet with built-in or compact rack-mounted structure).
1) Metal source power supplies: 4 units (1 with 1);
2) Baking lighting power supply: 1 unit;
3) Main control power supply (equipped with a 7-inch touch screen, PLC controller, and controls the sample stage, evaporation source, pump-valve switches, phase-sequence detection, as well as cable switch connectors, etc.): 1 unit.
8. Other technical parameters:
1) System status monitoring, misoperation protection, interlock and mutual locking, as well as one-button vacuum start/stop functions;
2) Power Supply: ~220V two-phase power system (peak power 5 kW);
3) Water Supply: Small chiller, cooling water temperature: 5°C to 35°C; operating ambient temperature: 10°C to 40°C.
4) Air supply: a compact, oil-free, silent air pump that delivers an air pressure of 0.2–0.3 MPa to actuate pneumatic valves;
5) Ultimate vacuum: better than 6×10⁻⁵ Pa; from atmospheric pressure to 6×10⁻⁴ Pa in less than 35 minutes (with dry nitrogen purging); after 12 hours of shutdown, the vacuum level is ≤10 Pa.
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