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Address: No. 6-5, Phase IV, Liandong U-Grove, Shenbei New District, Shenyang City, Liaoning Province
Mobile phone:13998121527(Manager Li)
Landline:024-86670968,024-86626713
Email:LiLu@kcvac.cn
Website:www.kcvac.cn
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High-Vacuum Organometallic Thermal Evaporation Coating System
Category:
Resistance Heating Evaporation Equipment
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Product Description
Main technical parameters:
1. The equipment’s ultimate vacuum level ≤ 5×10 -5 Pa, restore equipment operating vacuum ≤6×10 -4 Pa, less than 40 min (new equipment purged with dry nitrogen)
2. Total equipment leakage rate: After the equipment is shut down and the pump is stopped for 12 hours, the vacuum level shall be ≤10 Pa.
3. Spacing between the evaporation source and the substrate: 180 mm ± 60 mm
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