CATEGORY
Address: No. 6-5, Phase IV, Liandong U-Grove, Shenbei New District, Shenyang City, Liaoning Province
Mobile phone:13998121527(Manager Li)
Landline:024-86670968,024-86626713
Email:LiLu@kcvac.cn
Website:www.kcvac.cn
Product Center
Vacuum Thermal Evaporation Coating System
Category:
Resistance Heating Evaporation Equipment
Contact Us
Product Description
A total of 14 evaporation sources are provided, including 10 temperature-controlled organic evaporation sources and 4 metal current-controlled evaporation sources. The fully enclosed design completely eliminates cross-contamination and is a patented product of our company.
The sample stage features rotation, vertical translation, and heating (up to 200°C), enabling one in-line mask exchange. The mask is tightly aligned with the sample without any gap, and the stage can accommodate four 25 mm × 25 mm samples simultaneously (this technology is patented by our company). Each sample is equipped with an independent shutter, which is controlled in-line by a robotic arm.
1. Power Supply: ~380V three-phase power supply system (capacity 10 kW), cooling water circulation rate 0.3 m³ 3 /H, operating ambient temperature: 10°C to 40°C; cooling water temperature: 15°C to 20°C.
2. Maximum vacuum of the equipment: 5×10 -5 Pa; leak rate: 7×10 -8 Pa·L/S; working vacuum: 6×10 -4 Pa; the vacuum recovery time for work is less than 40 minutes (with dry nitrogen purging).
3. Substrate rotation speed: continuously adjustable from 5 to 30 rpm.
4. Substrate dimensions ≤ 25.4 × 25.4 mm.
5. Equipment installation area: 2 m × 3 m.
Related Products
