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Address: No. 6-5, Phase IV, Liandong U-Grove, Shenbei New District, Shenyang City, Liaoning Province
Mobile phone:13998121527(Manager Li)
Landline:024-86670968,024-86626713
Email:LiLu@kcvac.cn
Website:www.kcvac.cn
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High-Vacuum Multifunctional Vacuum Coating Machine
Category:
Resistance Heating Evaporation Equipment
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Product Description
Main equipment configuration:
1. There are two vacuum chambers: one is equipped with eight evaporation sources for organic materials, and the other with four evaporation sources for metallic materials.
2. A vacuum chamber for four sources (made of metallic materials) is equipped with an additional glove box; this configuration not only allows the evaporated substrate to be removed from the chamber, but also enables the evaporation material to be loaded into the evaporation source under a protective gas atmosphere.
3. Samples are transferred between the two vacuum chambers via a rail-based, electrically controlled transfer system utilizing a rail cart.
4. Up to four samples can be evaporated at a time, with the option for two in-line masking operations (20 mm × 30 mm).
5. The sample is heated using a tungsten-halogen lamp with automatic temperature control (maximum 200°C, accuracy ±1°C).
6. The metal evaporation source uses tungsten twisted wire.
7. Given the large number of evaporation sources and the impracticality of providing a dedicated power supply for each, a power conversion unit is installed for every evaporation source in each vacuum chamber, enabling convenient electrical control and switching operations.
8. Two sample stages (with electrically controlled lifting, rotation, positioning handover, and mask exchange).
9. One set of electrically controlled organic chamber top-opening system.
10. One set of PLC microcomputer control system.
11. Samples are transferred from the organic evaporation chamber to the metal evaporation chamber and then to the glove box via a rail-based automated handover system controlled by a touch screen.
12. Short recovery time to working vacuum, from atmospheric pressure to working vacuum (7×10 -4 Pa) Duration: 30–40 minutes (purge with dry nitrogen before exposure to atmosphere).
13. Ultra-high vacuum sealing primarily employs the following technologies: glass-to-metal welding, ceramic-to-metal welding, and knife-edge oxygen-free copper metal sealing. The entire system predominantly utilizes metal sealing; the front door is sealed with fluororubber O-rings, while the vacuum piping uses stainless steel metal bellows (rubber tubing is not used), and ultra-high vacuum valves are employed.
14. Sealing of moving parts employs magnetic coupling and metal bellows sealing technology.
15. The vacuum gauge employs a metal gauge, with a knife-edge metal sealing structure at the seal.
Equipment operating technical specifications:
1. The equipment's ultimate vacuum level is 6×10 -5 Pa, working vacuum level 5×10 -4 Pa.
2. Overall equipment leak rate: After the equipment is shut down and the pump is stopped for 12 hours, the vacuum level shall be ≤10 Pa.
3. The sample stage heating temperature can be adjusted from room temperature to 200°C, with a temperature control accuracy of ±1°C.
4. Cooling water circulation rate: 150 L/h.
5. Power Supply: Three-phase five-wire AC 380 V, with a total power rating of 20 kVA.
6. Ambient temperature: 10°C to 30°C.
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