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Address: No. 6-5, Phase IV, Liandong U-Grove, Shenbei New District, Shenyang City, Liaoning Province
Mobile phone:13998121527(Manager Li)
Landline:024-86670968,024-86626713
Email:LiLu@kcvac.cn
Website:www.kcvac.cn
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Resistance Evaporation Coating Equipment
Category:
Resistance Heating Evaporation Equipment
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Product Description
This equipment primarily utilizes resistive heating to achieve coating deposition, and its integrated design effectively saves space.
Scope of Application:
It is primarily used for the preparation of metal films, dielectric films, organic material thin films, and sample preparation for scanning electron microscopy, among other applications.
This equipment is easy to operate and highly versatile, making it well suited for teaching and research activities at universities and research institutes.
1. The pumping system employs a mechanical pump and a molecular pump, ensuring a clean vacuum environment.
2. Ultimate vacuum: ≤5.0×10⁻⁵ Pa.
3. Recovery time from vacuum to working condition ≤40 min (≤6.0×10⁻⁴ Pa)
4. Equipped with a metal evaporation source (tungsten filament), an organic beam source furnace, and other components; in-situ measurement of film thickness is available.
5. The sample can rotate, enabling gapless in-line masking twice; it can also be raised and lowered in-line to meet the optimal coating process requirements.
6. The steam power supply operates in a 1-on-2 mode, with electrically controlled switching.
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