CATEGORY
Address: No. 6-5, Phase IV, Liandong U-Grove, Shenbei New District, Shenyang City, Liaoning Province
Mobile phone:13998121527(Manager Li)
Landline:024-86670968,024-86626713
Email:LiLu@kcvac.cn
Website:www.kcvac.cn
Product Center
High-Vacuum Thermal Evaporation Coating Equipment
Category:
Resistance Heating Evaporation Equipment
Contact Us
Product Description
Main technical parameters of the equipment:
1. Ultimate vacuum ≤ 6×10⁻⁵ Pa
2. Restore the equipment to a working vacuum of ≤6×10⁻⁴ Pa within 40 minutes (for new equipment, purge with dry nitrogen).
3. Evaporation boat equipped with a manual magnetic coupling baffle
4. The equipment is configured with one sample holder and one mask plate.
5. The 18 beam-source furnaces have a maximum temperature of 600°C, with a temperature control accuracy of ±1°C.
6. Overall equipment leakage rate: After the equipment is shut down and the pump is stopped for 12 hours, the vacuum level shall be ≤10 Pa.
7. Spacing between the evaporation source and the substrate: 180 mm ± 60 mm
8. The water and oxygen content in the glove box is less than 1 ppm.
Main equipment configuration:
1. The vacuum chamber is fabricated from 304-grade stainless steel specially designed for vacuum applications, with an inner diameter of 480 mm and a height of 495 mm (customization available based on specific requirements).
2. Six sets of tantalum evaporation boats and 18 sets of beam-source furnaces
3. Two heating power supplies for the evaporation boat and six heating power supplies for the beam source furnace, equipped with a manual switching mechanism.
4. Equip two CF150 ultra-high vacuum gate valves, two CF35 ultra-high vacuum angle valves, two vent valves, two CF16 inflation valves, two resistance gauges, and two ionization gauges.
5. A height-adjustable and rotatable sample deposition turntable, along with one substrate holder assembly, featuring a continuously adjustable rotation speed of 2 to 30 rpm.
6. The transfer chamber is equipped with two CF200 gate valves.
7. One set of baking illumination system, one set of substrate bulk shield, two sets of CF100 glass-metal observation windows and shields, one set of CF63 glass-metal observation window and shield, several metal-ceramic welding electrodes, and two control cabinets.
8. Two 600 L/s molecular pumps, two 2XZ-8 mechanical pumps, three sets of foreline piping, and piping equipped with Ø32 stainless steel metal bellows.
Related Products
