CATEGORY
Address: No. 6-5, Phase IV, Liandong U-Grove, Shenbei New District, Shenyang City, Liaoning Province
Mobile phone:13998121527(Manager Li)
Landline:024-86670968,024-86626713
Email:LiLu@kcvac.cn
Website:www.kcvac.cn
Product Center
Product Description
1. One set of sputtering vacuum chamber assembly, featuring a spherical vacuum chamber with a diameter of 300 mm, fabricated from vacuum-grade 304 stainless steel using argon arc welding and surface-treated with glass bead blasting. All flanged ports are designed in accordance with ultra-high vacuum system standards and employ metal-to-metal sealing.
2. A 600 L/s molecular pump combined with a 4 L/s mechanical pump is used for primary pumping via a CF150 ultra-high vacuum gate valve, with auxiliary pumping provided through a CF35 angular valve.
3. Two sealed observation windows and one Ф100 quartz glass window (for the 248 nm UV band, used for laser incidence).
4. Electromagnetic isolation vent valve: (Beijing) KF40, 1 unit.
5. One set of metal bellows connecting the molecular pump to the mechanical pump; one set of bypass metal bellows piping and a CF35 angle valve between the mechanical pump and the vacuum chamber.
6. CF150 gate valve: used to isolate the molecular pump from the vacuum chamber.
7. One set of vacuum measurement and electrical control system, including one ZDF digital composite ultra-high vacuum gauge (all with metal ionization chambers).
8. Main power supply: Provides power to the mechanical pump, vacuum gauge, and other equipment, with one set of protection against power failure, water outage, and phase loss.
9. Frame: Constructed from high-quality square steel profiles (40 mm × 40 mm × 3 mm) welded together, with four casters—lockable for stability and movable for flexibility.
10. Metal-sealed copper rings conforming to the specifications in the attachment, a complete set of stainless steel fasteners—including bolts, nuts, and washers—featuring fluororubber seals; and a complete set of oxygen-free copper sealing gaskets (in the relevant specifications): CF16: 3 pieces; CF35: 3 pieces; CF150: 2 pieces; CF100: 4 pieces.
11. Relevant technical documentation: Instruction manuals for all purchased components; equipment structural schematic diagram and structural diagrams of key components (1 set); electrical control system schematic and structural diagram (1 set); packing list (1 set); certificate of factory acceptance inspection for the equipment (1 set).
12. Operating Conditions and Main Technical Parameters: Power Supply: Three-phase five-wire system, ~380 V (capacity 5 kW). Relative Humidity: ≤80%.
Previous Page
Next page
Previous Page
Next page
Related Products
