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Address: No. 6-5, Phase IV, Liandong U-Grove, Shenbei New District, Shenyang City, Liaoning Province
Mobile phone:13998121527(Manager Li)
Landline:024-86670968,024-86626713
Email:LiLu@kcvac.cn
Website:www.kcvac.cn
Product Center
Product Description
1. One set of sputtering vacuum chamber assembly, with a spherical chamber diameter of Ф300 mm, fabricated from vacuum-grade 304 stainless steel using argon arc welding and surface-treated with glass bead blasting. All flanged ports are designed for ultra-high vacuum systems and employ metal seals.
2. A 600 L/s molecular pump combined with a 4 L/s mechanical pump is used for primary pumping via a CF150 ultra-high vacuum gate valve, with auxiliary pumping provided through a CF35 angular valve.
3. Two sealed observation windows and one Ф100 quartz glass window (for the 248 nm UV band, used for laser incidence).
4. Electromagnetic isolation vent valve: (Beijing) KF40, 1 unit.
5. One set of metal bellows connecting the molecular pump and the mechanical pump; one set of bypass metal bellows piping with a CF35 angle valve between the mechanical pump and the vacuum chamber.
6. CF150 gate valve: used to isolate the molecular pump from the vacuum chamber.
7. One set of vacuum measurement and electrical control system, including one ZDF digital composite ultra-high vacuum gauge (all with metal ionization chambers).
8. Central Power Supply: Provides power to the mechanical pump, vacuum gauge, and other equipment, with one set of protection against power failure, water outage, and phase loss.
9. Frame: Constructed from high-quality square steel profiles (40 mm × 40 mm × 3 mm) by welding, equipped with four casters for both locking and mobility.
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