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Address: No. 6-5, Phase IV, Liandong U-Grove, Shenbei New District, Shenyang City, Liaoning Province
Mobile phone:13998121527(Manager Li)
Landline:024-86670968,024-86626713
Email:LiLu@kcvac.cn
Website:www.kcvac.cn
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High-Vacuum Six-Source Thermal Evaporation System
Category:
Resistance Heating Evaporation Equipment
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Product Description
Equipment Technical Specifications:
1. Vacuum chamber body: 1 set
1) Appearance: 304 stainless steel D-shaped front and rear doors (the rear door is a hinged square door for easy cleaning of the vacuum chamber, internal commissioning and maintenance, and loading/unloading of items; the front door is a horizontal pull-type square door). One set of vacuum chamber body (after physical polishing, followed by chemical electropolishing, ensuring a clean and aesthetically pleasing interior and exterior; internal dimensions: D400 × 480 mm), with three sets of DN100 viewing windows on the front and rear doors.
2) Bottom: three sets of metal-source interfaces, three sets of organic-source interfaces, one set of domestically produced 600 L/s air-cooled molecular-pump interface, two sets of CF25 illumination interfaces, and two sets of imported water-cooled film-thickness probe interfaces;
3) Top: one set of sample stage interface, one set of electric baffle interface, and one set of KF16 pneumatic angle valve interface;
4) Left side: one set of CF35 pneumatic pre-pump angle valve interface, one set of KF16 pneumatic vent valve interface.
2. Metal/Organic Source System: 1 set
1) Three sets of metal evaporation sources: Three sets of water-cooled copper electrodes, compatible with evaporation boats (tungsten, molybdenum, and tantalum) and helical filaments; tool-free disassembly; equipped with pneumatic shutters; two 1 kW silicon-controlled rectifier voltage-regulating power supplies with digital displays; current adjustment accuracy of 0.1 A (fine-tuning); power output sufficient for the evaporation deposition of common metals and metal oxides.
2) Three sets of organic evaporation sources: 4 CC quartz boat, two temperature-control power supplies (temperature-control meter display accuracy: 0.1°C), temperature range: room temperature to 500°C (temperature-control accuracy ±1°C), equipped with pneumatic dampers;
3) Separator: The evaporation source is partitioned to prevent cross-contamination.
3. Sample stage system: 1 set
1) Function: Height-adjustable and rotatable (rotational speed continuously adjustable from 0 to 30 rpm);
2) Holder: 8 substrate wafers, 20 mm × 20 mm, with a mask plate; capable of online vacuum switching of the mask pattern once.
3) Evaporation distance: the distance between the substrate and the evaporation source is 200–300 mm;
4) Baffle: One set of electric baffle for the sample holder.
4. Vacuum pump unit: 1 set
1) One domestically produced 600 L/s air-cooled molecular pump;
2) One 8 L/s direct-drive rotary vane pump;
3) One CF150 high-vacuum pneumatic slide valve;
4) One CF35 high-vacuum pneumatic butterfly valve;
5) Two KF16 high-vacuum pneumatic butterfly valves;
6) One KF40 high-vacuum pneumatic butterfly valve;
7) One KF40 vacuum solenoid inflation valve;
8) Two sets of KF40 pump-valve connection hoses and one set of KF40 three-way fittings;
9) ZDF-5227 vacuum gauge, 1 unit.
5. Film Thickness Measurement System: 1 set
1) Film thickness gauge: One set of Yingfukang SQM160 two-channel film thickness monitor;
2) Film thickness probe: Two sets of imported water-cooled film-thickness probes.
6. Equipment rack: 1 set
1) One set of welded frame made of 40 carbon steel square tubing, with a powder-coated surface;
2) Four 3-inch swivel casters for easy movement and adjustment;
3) Four M16 anchor bolts for locking and positioning.
7. Electrical Control System: 1 set (electrical control is integrated into the rack)
1) Organic-source power supplies: 2 units (1 with 2);
2) Metal source power supplies: 2 units (1 with 2);
3) Evaporation source baffle power supply: 1 unit;
4) Yingfukang SQM160 two-channel film thickness monitor: 1 unit;
5) Sample stage and its baffle power supply: 1 unit;
6) Baking illumination power supply: 1 unit;
7) PLC controller (with a 10-inch touch screen): 1 unit;
8) Main control power supply (including the mechanical pump power supply): 1 unit.
8. Other technical parameters:
1) Phase-loss protection, misoperation protection, and other functions;
2) Power Supply: ~220V two-phase power supply system (peak power 6 kW);
3) Water Supply: Small chiller, cooling water temperature: 5°C to 35°C; ambient operating temperature: 10°C to 40°C.
4) Gas supply: a compact, oil-free, silent air pump that delivers 0.2–0.3 MPa of air pressure to actuate pneumatic valves;
5) Ultimate vacuum: better than 6×10⁻⁵ Pa; from atmospheric pressure to 6×10⁻⁴ Pa in less than 35 minutes (with dry nitrogen purging); after 12 hours of shutdown, the vacuum level is ≤10 Pa.
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