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High-Vacuum Dual-Chamber Multifunctional Coating Equipment

Category:

Electron Beam and Ion Beam Coating Equipment


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Product Description

Vacuum: Ultimate vacuum of 6×10⁻⁵ Pa
   Working vacuum: 6 × 10⁻⁴ Pa
   Vacuum recovery time for work: ≤10 minutes when connecting to the glove box
   Do not connect the glove box; purge with dry nitrogen for ≤30 minutes.
One set of electron-beam coating equipment with four crucibles
Metal evaporation sources and organic evaporation sources can be configured according to customer requirements.
Coating thickness probes and coating thickness gauges are available in both domestic and imported options.
The metal evaporation source is equipped with a 1000 W power supply.
The organic evaporation source is equipped with a temperature-controlled power supply, with a temperature control accuracy of ±1°C.
 
 
 

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