CATEGORY
Address: No. 6-5, Phase IV, Liandong U-Grove, Shenbei New District, Shenyang City, Liaoning Province
Mobile phone:13998121527(Manager Li)
Landline:024-86670968,024-86626713
Email:LiLu@kcvac.cn
Website:www.kcvac.cn
Product Center
Product Description
Vacuum: Ultimate vacuum of 6×10⁻⁵ Pa
Working vacuum: 6 × 10⁻⁴ Pa
Vacuum recovery time for work: ≤10 minutes when connecting to the glove box
Do not connect the glove box; purge with dry nitrogen for ≤30 minutes.
This equipment suite is a custom-built, high-vacuum cluster-type multifunctional coating system tailored to customer specifications, featuring a magnetron sputtering chamber, a thermal evaporation chamber, a cleaning chamber, and a transfer chamber.
Each chamber can operate independently, and the transfer chamber can convey samples between chambers and deliver them to the glove box.
Metal evaporation sources and organic evaporation sources can be configured according to customer requirements.
Coating thickness probes and coating thickness gauges are available in both domestic and imported options.
The metal evaporation source is equipped with a 1000 W power supply.
The organic evaporation source is equipped with a temperature-controlled power supply, with a temperature control accuracy of ±1°C.
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